Guide to Characteristics and Characterization of Semiconductor Surfaces

Author: Jerzy Ruzyllo

Publisher finelybook 出版社:‏ ‎ World Scientific Pub Co Inc

Edition 版本:‏ N/A

Publication Date 出版日期:‏ 2025-04-24

Language 语言: English

Print Length 页数: 220 pages

ISBN-10: 9811254818

ISBN-13: 9789811254819

Book Description

This Comprehensive Compendium Explores Aspects Of Semiconductor Surface Characteristics And Characterization From The Perspective Of Applied Semiconductor Device Research And Process Development, Rather Than An In-Depth Coverage Of Surface Science Related Issues. It Provides Guidance To The Features Of Semiconductor Surfaces Affecting Performance Of The Practical Semiconductor Devices, As Well As Selection Of Methods Used To Characterize Those Features. Based On The Author’S Thirty Years Of Research And Teaching In Semiconductor Surface Processing And Characterization, This Unique Reference Text Addresses The Needs Of Graduate Students, Researchers, And Professionals Who Are Familiar With Semiconductor Engineering And Would Like To Learn About The Practical Aspects Of Semiconductor Surface Characteristics, Processing Techniques, And Characterization Methods Used In Device Process Development, Process Diagnostics And Monitoring.

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